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本文介绍了硅集成液体流量传感器的结构、工作原理和新颖的背面敏感封装技术。理论和实验结果表明,这种传感器具有很高的灵敏度,特别适合于液体小流量的测量。
This paper introduces the structure, working principle and novel back sensitive package technology of silicon integrated liquid flow sensor. Theoretical and experimental results show that this sensor has high sensitivity, especially suitable for the measurement of small liquid flow.