论文部分内容阅读
一、前言用激光干涉测长仪测量尺寸,误差因素比较多,对此必须充分注意。二、激光测长的原理激光测长就是对图1所示的光学系统产生的干涉条纹进行计数。从激光头出来的激光,进入分束器,被分成直进光与偏转90°的光,它们分别射向直角棱镜,被直角棱镜反射的光又回到分束器,相互干涉后,进入激光头内的光探测器。
First, the foreword Measure the size with the laser interferometer length measuring instrument, the error factor is more, this must pay full attention. Second, the principle of laser length measurement Laser length measurement is shown in Figure 1, the interference generated by the optical system stripes are counted. The laser coming out of the laser head enters the beam splitter and is split into a straight-ahead light and a light deflected by 90 °, each of which is directed at a right-angle prism, and the light reflected by the right-angle prism returns to the beam splitter again to interfere with each other and enters the laser Head of the light detector.