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本文采用有限差分法,数值研究了具有介质钝化层的铝薄膜上的瞬态温度分布,着重研究了介质膜种类及厚度对这一分布的影响。结果指出,采用高热导率的Si_3N_4(或Al_2O_3)介质膜钝化,可以大幅度地降低铝薄膜的峰值温度及温度梯度。这对提高铝膜的电徙动寿命及抗电流浪涌能力是非常有益的。
In this paper, the transient temperature distribution on the aluminum film with dielectric passivation layer is numerically investigated by finite difference method. The influence of dielectric film type and thickness on this distribution is studied emphatically. The results show that the passivation of Si_3N_4 (or Al_2O_3) with high thermal conductivity can greatly reduce the peak temperature and the temperature gradient of the aluminum film. This is to improve the electric migration life of aluminum and anti-current surge capability is very useful.