,Electrical and Pyroelectric Properties of Sol-Gel Derived (Pb, Ca)TiO3 Thin Films with Various Orie

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(Pb0.76Ca0.24)TiO3(PCT)thin films with various orientations were grown on Pt/Ti/SiO2/Si substrates by using a sol-gel process and by controlling the temperature of heat-treatment.The PCT thin films with(100)and random orientation showed well-saturated hysteresis loops at an applied field of 800kV/cm,with remanent polarization and coercive electric field of 23.6 μC/cm2 and 225 k V/cm,17.8 μC/cm2 and 195 k V/cm,respectively.For highly(100)-and random-oriented PCT films,the dielectric constant and dielectric loss values of these films are 121 and 0.016,121 and 0.024 at 1 kHz,respectively.The pyroelectric coefficients p of the PCT thin films are measured by a dynamic technique.At room temperature,the p values and figures of merits of the highly(100)-and random-oriented PCT films are 185μC/m2K and 1.79 × 10-5Pa-0.5,176μC/m2K and 1.39 × 10-5Pa-0.5,respectively.
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