论文部分内容阅读
介绍了一种新型电子冷却系统—离子拖曳电液动力微泵,运用MEMS技术在硅片上加工了离子拖曳微泵并进行了测试,微泵由一组平面电极组成,电极的宽度为40μm,发射极和集电极之间的间距为50μm,共有90对电极对,每组电极对之间的距离为100μm。微泵静压力实验以HFE7100和无水乙醇作工作流体,通过施加直流电压来驱动工作流体,当输入电压为200 V时,微泵可以得到250 Pa的静压力。实验结果表明:微泵的静压力与施加的输入电压成二次方关系,同微流道的高度成反比。实验发现工作介质的物性参数也是决定泵性能的一个重要因素,选择合适的流体可以提高整个微泵冷却系统的性能。研究还表明,微泵的性能与工作寿命和实验环境的洁净度以及工作流体提纯密切相关。
A new type of electronic cooling system - ion drag electro-hydraulic micropump was introduced. The ion drag micropump was machined on silicon wafer by MEMS technology and tested. The micropump consisted of a set of planar electrodes with a width of 40 μm, The spacing between the emitter and the collector is 50 μm, with a total of 90 pairs of electrodes, each with a distance of 100 μm. Micropump static pressure experiment with HFE7100 and anhydrous ethanol as the working fluid, by applying a DC voltage to drive the working fluid, when the input voltage is 200 V, the micro pump can get a static pressure of 250 Pa. The experimental results show that the static pressure of the micro pump is quadratic with the applied input voltage and inversely proportional to the height of the microchannel. Experiments found that the physical properties of the working medium parameters also determine the pump performance is an important factor in the choice of a suitable fluid can improve the performance of the entire micro-pump cooling system. The study also showed that the performance of the micro-pump is closely related to the working life and the cleanliness of the experimental environment as well as the purification of the working fluid.