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叙述了已研制成功的红外移相式数字干涉仪的原理和性能，光源为ＣＯ２激光器（λ＝１０．６μｍ），该仪器光路是斐索型干涉系统，孔径为２５０ｍｍ，不确定度ＰＶ值优于λ／１３０（２σ）；也可构成泰曼球波面干涉系统。采用压电晶体驱动参考反射镜作相位调制，完成了对热释电摄像机的热电靶的温度调制。给出红外望远系统波前和光盘基片平面度实测光程差的二维等值图和三维立体图。
The principle and performance of the developed infrared phase shift digital interferometer are described. The light source is a CO2 laser (λ = 10.6μm). The optical path of the instrument is a Fizeau interferometric system with an aperture of 250mm. The uncertainty PV Better than λ / 130 (2σ); can also constitute a Terman spherical wave interference system. The piezoelectric crystal drives the reference mirror for phase modulation and completes the temperature modulation of the pyroelectric target of the pyroelectric camera. The two-dimensional contour maps and three-dimensional maps of measured optical path difference of the flatness of the wavefront and the disc substrate of the infrared telephoto system are given.