磁性液体薄膜微形变的磁控研究

• 作 者: 刘同冈 郭岩 邹学壮 吴健
• 机 构: 中国矿业大学机电工程学院,
• 出 处: 微纳电子技术
• 发表日期: 2014年04期
• 关键词: magnetic fluid thin film magnetic control lithography mask micro-deformation

针对磁性液体薄膜在MEMS加工领域作为光刻掩膜的应用,为获得磁性液体薄膜在磁场作用下的微形变规律,设计了一套磁场下磁性液体薄膜微形变的磁控测试实验台,并从磁场强度、磁性液体种类、磁性液体中磁性颗粒质量分数、磁性液体量和磁场梯度五个方面对其微形变特性进行实验研究。利用磁性液体薄膜形变高度和半径两个参数对其微形变效果进行了评价,实验结果表明:磁性液体薄膜凸起高度与磁场强度平方呈正比;基载液密度低的磁性液体凸起高度大;烃基磁性液体在磁性颗粒质量分数为25%时形变效果最好;磁性液体在达到一定的体积后其凸起高度几乎不变;磁场梯度越大,其凸起高度越明显,形变图形越佳。

Aiming at the application of magnetic liquid film in the field of MEMS processing as a photolithographic mask, a set of magnetic control test bench for micro-deformation of magnetic thin film in magnetic field was designed in order to obtain the micro-deformation law of magnetic liquid film under magnetic field. Magnetic field strength, type of magnetic fluid, mass fraction of magnetic particles in magnetic fluid, amount of magnetic fluid and magnetic field gradients. The results show that the height of magnetic film is proportional to the square of magnetic field and the height of magnetic liquid with low carrier density is large. Hydrocarbon-based magnetic fluid has the best deformability when the mass fraction of magnetic particles is 25%. When the volume of magnetic fluid reaches a certain volume, the height of the protuberance is almost unchanged. The larger the magnetic field gradient, the more prominent the protuberance is.