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在分析了原子力显微镜(AFM)探针在测量及加工领域应用过程中,探针磨损对于实验结果的影响的基础上,综述了Si3N4针尖、金刚石针尖和单晶硅针尖的磨损机理。并展望了探针磨损机理的发展趋势。
The wear mechanism of Si3N4 tip, diamond tip and monocrystalline silicon tip was reviewed on the basis of analyzing the influence of AFM probe in the field of measurement and processing and probe wear on the experimental results. The development trend of probe wear mechanism is also prospected.