Study of Carbon Nano-Tube Photo-electronic Devices by Nano-Imprint Lithography

• 作 者: Liu Hongzhong Ding Yucheng Yin
• 机 构: StateKeyLaboratoryforManufacturingSystemsEngineering,KeyLaboratoryofOpto-ElectronieTechnologyandInte
• 出 处: 兰州交通大学学报
• 发表日期: 2007年6期
• 关键词: 碳纳米管 纳米印刷 平板印刷 照相制版 微电子机械系统
• 基金项目: AcknowledgementThis work was supported by 973 Basics Science Research Program （grant No. 2003CBT16203）,the National Science Foundation of China （grant No. 50505037）, 863 Hi-Tech Program （grant No. 200

<正>Introduction With the remarkable properties in mechanical,electronic and magnetic,fabrication of carbon nanotube (CNT) arrays has drawn ever-increasing worldwide attention in application of field emission display (FED) and sensor