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By vacuum sputtering and annealing processes of gold (Au) films on boron-doped diamond (BDD) surfaces,Aunanoparticles/BDD (AuNP/BDD) composite substrates were prepared as surface-enhanced Raman scattering (SERS) substrates.The SERS performances of the substrate were investigated using methylene blue molecule as a probe.With the AuNPs having an average diameter of 20nm,high performance of SERS was achieved at an enhancement factor of 9 × 105,arising from the synergistic effect of electromagnetic enhancement from AuNPs and chemical enhancement from diamond.The AuNP/BDD substrate is demonstrated to be highly sensitive,reproducible,stable,and reusable for the SERS examination.Due to the facile preparation process and controllable surface morphology,the AuNP/BDD substrates are favorable as a high performance SERS platform performed in practical applications.