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SnO2 透明导电膜的光学、电学特性与它的结构有关 .研究衬底温度对薄膜结构的影响表明 :衬底温度影响薄膜的结晶程度 ,衬底温度高 ,容易结晶化 ,衬底温度低 ,则易形成无定形结构的膜 .
The optical and electrical properties of SnO2 transparent conductive film are related to its structure.The effects of substrate temperature on the structure of the thin film are studied.The results show that the substrate temperature affects the crystallinity of the thin film and the substrate temperature is high and easily crystallized. Easy to form amorphous structure of the film.