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A novel hybrid instrument of contact and non-contact measurement with large range is developed, and both measure-ment systems are based on a Linnik interference microscope and on white-light interference measuring techniques. The ambiguity presented in conventional monochromatic interferometers is not present in the contact and non-contact measurement, and they have a virtually unlimited unambiguous range. For the contact meas-urement, the vertical measuring range is ±5 mm with a resolution of 1 nm and the horizontal measuring range is ±25 mm in x-range and y-range with a resolution of 1.25 μm; for the non-contact measurement, the vertical measuring range is ±5 mm with a reso-lution of 1 nm and the horizontal resolution better than 0.5 μm.
A novel hybrid instrument of contact and non-contact measurement with large range is developed, and both measure-ment systems are based on a Linnik interference microscope and on white-light interference measuring techniques. The ambiguity presented in conventional monochromatic interferometers is not present in the contact and non-contact measurement, and they have a virtually unlimited unambiguous range. For the contact meas-urement, the vertical measuring range is ± 5 mm with a resolution of 1 nm and the horizontal measuring range is ± 25 mm in x- range and y-range with a resolution of 1.25 μm; for the non-contact measurement, the vertical measuring range is ± 5 mm with a reso- lution of 1 nm and the horizontal resolution better than 0.5 μm.