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介绍了一个高精度的微动工作台,该工作台以柔性铰链为弹性导轨,并采用了一种新型驱动器作为驱动元件,实现了较高的定位精度。同时对工作台的特性进行了实验和分析。
A high-precision micro-movement table is introduced. The workbench uses a flexible hinge as the elastic guide rail and adopts a new type of actuator as the driving element, achieving high positioning accuracy. At the same time, the characteristics of the workbench were tested and analyzed.