论文部分内容阅读
本文研究了一种基于形状记忆合金(SMA)驱动的常闭型微阀.该微阀结构由弹性沟道层和形状记忆合金桥两部分组成,利用形状记忆合金微丝在相变过程中产生的拉力,打开微阀结构.通过对微阀的测试得出,其打开压力为4 000 Pa左右,开启时间和关闭时间分别为0.6 s和1 s.此外,当电流在0.14～0.30 A内,可得到6.7—75.2μL/min的近似线性流量调节范围.该形状记忆合金常闭微阀的制造采用聚二甲基硅氧烷(PDMS)的软光刻工艺实现,之后采用印刷电路板(PCB)上的形状记忆合金丝焊接组装搭建驱动结构.
In this paper, a kind of normally closed microvalve driven by shape memory alloy (SMA) is studied.The microvalve consists of an elastic channel layer and a shape memory alloy bridge, which is produced by the shape memory alloy microfilament during the phase transition Of the micro-valve to open the micro-valve structure test results obtained by the micro-valve, the opening pressure is about 4,000 Pa, turn-on time and turn-off time were 0.6 s and 1 s. In addition, when the current in 0.14 ~ 0.30 A, An approximate linear flow adjustment range of 6.7-75.2 μL / min is achieved.The shape memory alloy NC valve is fabricated using a soft photolithography process using polydimethylsiloxane (PDMS) followed by a printed circuit board (PCB ) On the shape memory alloy wire welding assembly to build drive structure.