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微系统(Micro System)也称微机电系统(MEMS)或微机械加工(Micro Machining)是指集成了微电子和微机械的系统,或除此外还将微光学、化学.生物等其他微元件集成在一起的系统(集成微光机电生化系统)。微系统不用传统的加工方式制造.而是以批量化的微电子制造技术为基础.加上特有的三维加工技术,并与IC集成在一起,组成个可以完成信息获取、处理及执行功能的完整信息系统。这思想无论是科学意义还是经济效益都是重大的。微系统技术的发展为解决未来信息系统的微型化问题提供了一条有效途径。
Micro System Also called micro-electromechanical system (MEMS) or micro-machining (Micro Machining) refers to a system that integrates microelectronics and micromachining, or in addition integrates other micro-components such as micro-optics, chemistry, biology, The system together (integrated micro-electro-mechanical system). Microsystems do not have to be manufactured using conventional machining methods, but rather are based on mass-produced microelectronic manufacturing techniques, combined with unique 3D processing techniques and integrated with the IC to form a complete set of information acquisition, processing and execution functions Information system. This idea is of great scientific and economic interest. The development of microsystem technology provides an effective way to solve the miniaturization problem of the future information system.