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报道了输出波长980 nm的高峰值功率垂直腔面发射激光器(VCSEL)及其微型化脉冲激光光源.通过优化VCSEL单元器件的结构,有效抑制了宽面VCSEL结构中的非均匀电流分布,提高了单元器件的斜率效率,获得了直径400μm,峰值输出功率62 W的VCSEL单元器件;在此基础上,研制出由单元器件组合封装而成的VCSEL“准列阵”子模块以及集成驱动电路的微型化VCSEL脉冲激光光源,该光源在脉冲驱动条件为30 ns、2 k Hz、105 A条件下的峰值输出功率达到226 W,光脉冲宽度35 ns,中心波长979.4nm,斜率效率达到2.15 W/A.
The high peak power vertical cavity surface emitting laser (VCSEL) with its output wavelength of 980 nm and its miniaturized pulsed laser source are reported.The structure of the VCSEL device is optimized to suppress the non-uniform current distribution in the wide-area VCSEL structure, The efficiency of the slope of the device, get the VCSEL unit with a diameter of 400μm, the peak output power of 62W; on this basis, VCSEL “quasi-array ” sub-module encapsulated by the combination of the unit devices and the integrated drive circuit Miniaturized VCSEL pulsed laser light source with a peak output power of 226 W under pulse driving conditions of 30 ns, 2 k Hz and 105 A, an optical pulse width of 35 ns, a center wavelength of 979.4 nm and a slope efficiency of 2.15 W / A.