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本文介绍一种实用的玻璃冷吸附泵。这种泵是无水、无电、无损和无油的“四无”真空系,可用作无油真空系统的前置泵及其它用途。单级泵可达9×10~(-3)乇,双极泵并用液氮蒸汽吹洗可达5.8×10~(-6)乇,带吸附阱的机械泵与单极泵联用可达2.6×10~(-4)乇的极限压强。吸附泵用国产5A型分子筛作吸附剂,液态氮作冷却剂,液氮的耗损量约150毫升/小时。文中详细阐述利用“液氮蒸汽吹洗法”降低极限压强的方法。文中还给出测量吸附泵参量的真空实验系统和测量方法。列举文献52篇供参考。
This article describes a practical glass cold adsorption pump. This pump is an anhydrous, electroless, nondestructive and oil-free “four-no” vacuum system that can be used as a front-pump for oil-free vacuum systems and for other applications. Single-stage pump up to 9 × 10 ~ (-3) Torr, bipolar pump and liquid nitrogen vapor purge up to 5.8 × 10 -6 Torr, with adsorption trap mechanical pump and monopolar pump combined reachable The ultimate pressure of 2.6 × 10 -4 Torr. Adsorption pump with domestic 5A molecular sieve as adsorbent, liquid nitrogen as a coolant, liquid nitrogen depletion of about 150 ml / h. The paper elaborates the method of reducing the ultimate pressure by “liquid nitrogen steam purge method”. The paper also gives a vacuum experimental system and measurement method to measure the adsorption pump parameters. List 52 articles for reference.