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基于硅加工的高灵敏微型隧道传感器在过去15年里得到了充分的发展。多种隧道传感器被开始出来,例如加速度计,角速度计,红外传感器,磁性传感器等。首先对基于硅加工的隧道传感进行了简单的总结。对四种传感器进行了总结和讨论,包括几种器件的结构设计,加工过程,器件性能,控制电路和系统噪音。特别介绍了一种新型的基于高分子聚合物的隧道加速度计,并讨论了其结构,加工与测试,隧道效应得到了进一步验证。同时给出了这种新型高灵敏传感器在很多领域的应用展望。
Highly sensitive micro-tunneling based on silicon processing has been well developed over the past 15 years. A variety of tunnel sensors are started, such as accelerometers, angular velocity meters, infrared sensors, magnetic sensors and the like. First, a brief summary of tunneling based on silicon processing is given. The four sensors are summarized and discussed, including the structural design of several devices, processing, device performance, control circuits and system noise. In particular, a new type of tunneling accelerometer based on polymer has been introduced. Its structure, processing and testing have also been discussed. The tunneling effect has been further verified. At the same time, the application prospect of this new type of high sensitive sensor in many fields is given.