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巨磁电阻自旋阀多层膜作为磁敏传感器材料与磁随机存储器 (MRAM)材料 ,具有高的可靠性与灵敏度 ,在航空航天等高科技领域有着极大的应用前景。研究多层膜各层间的耦合效应与各层厚度、磁学性能之间的内在关系 ,对提高自旋阀的巨磁电阻效应、磁灵敏性等具有重要的作用。本研究采用磁控溅射沉积制备了 (Cu/Co、Cu/Ni Fe,Ta/Ni Fe双层膜与 Co/Cu/Co、Co/Cu/Ni Fe、Co/Ta/Ni Fe)三明治结构薄膜。采用振动样品磁强计对薄膜磁性、四探针法对薄膜磁阻性能进行了测试研究 ,采用洛仑兹电子显微镜法观察了薄膜的磁畴结构。研究结果表明 ,层间耦合效应不仅与非磁性中间层的厚度相关 ,而且与中间层材料的特性相关。磁阻与磁畴观察均表明层间耦合效应随中间层厚度的增加而减小 ,而 Cu作为中间层的多层膜的层间耦合大于 Ta作为中间层的层间耦合。
Giant magnetoresistive spin valve multilayer film as magnetic sensor material and magnetic random access memory (MRAM) material, with high reliability and sensitivity, in the aerospace and other high-tech fields have great application prospects. It is important to study the relationship between the coupling effect of multilayer layers and the thickness and magnetic properties of each layer, and to improve the giant magnetoresistance effect and magnetic sensitivity of the spin valve. In this study, Cu / Co, Cu / NiFe, Ta / NiFe bilayers and Co / Cu / Co, Co / Cu / NiFe, Co / Ta / NiFe sandwich structures were prepared by magnetron sputtering film. The magnetocaloric properties of thin films were measured by vibrating sample magnetometer. The magnetic properties of the films were observed by Lorentz electron microscopy. The results show that the interlayer coupling effect is not only related to the thickness of the non-magnetic intermediate layer, but also to the properties of the interlayer material. Magnetoresistance and magnetic domain observation both show that the interlayer coupling effect decreases with the increase of the interlayer thickness, while the interlayer coupling of multilayers with Cu as the interlayer is greater than the interlayer coupling of Ta as the interlayer.