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以IC10高温合金作为基体,采用电子束物理气相沉积(Electron Beam Physical Vapor Deposition,EB-PVD)技术对与基体相同成分的IC10靶材进行蒸发并得到沉积态的Ni基高温合金。利用扫描电子显微镜、纳米压痕仪、万能拉伸机等研究了沉积态、热处理态Ni基高温合金的微观组织和力学性能。结果表明:沉积态合金呈柱状晶结构,晶粒细小,但存在微孔洞和微裂纹等缺陷;1200℃×2 h真空热处理后合金柱状晶转变为等轴晶,缺陷得到了明显改善;600℃以下合金与基体的结合强度较高,随温度升高结合强度降低。
The IC10 superalloy was used as the substrate, and the IC10 target with the same composition as that of the substrate was evaporated by Electron Beam Physical Vapor Deposition (EB-PVD) technology to obtain the as-deposited Ni-based superalloy. The microstructures and mechanical properties of Ni-based superalloys deposited and annealed were studied by scanning electron microscopy, nanoindentation and universal tensile tester. The results show that the as-deposited alloy has columnar crystal structure with fine grains, but there are defects such as micropores and micro-cracks. The alloy columnar crystals transform into equiaxed grains after vacuum heat treatment at 1200 ℃ for 2 h, and the defects are obviously improved. ℃ The following alloy and matrix bonding strength is higher, with the increase of temperature, the bonding strength is reduced.