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The NiCrAlTi coatings free of N and with N incorporations were deposited on austenitic stainless steel 304L by magnetron sputtering in Ar and in gas mixture of Ar and N2,respectively.The N incorporated in the coatings existed as nitride precipitates (from ～3 vol.％ to ～ 17 vol.％) after vacuum annealing.All the NiCrAlTi coatings,whatever free of N or with N incorporations,exhibited better resistance against cavitation erosion than ion plating TiN coating and the substrate 304 L in ultrasonic cavitation tests.The NiCrAlTi coating free of N incorporation presents superior cavitation erosion resistance.However,the nitrogen incorporation within the NiCrAlTi coatings showed negative effects on the resistance against cavitation erosion.