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通过测量压电悬臂梁的等效电容来检测悬臂梁的振动信息,以应用于基于扫描探针技术的高密度信息存储中进行数据读取.在压电悬臂梁的PZT压电层上施加交流电场使其工作在共振状态,并使其自由端与存储介质进行周期性的接触.当悬臂梁的自由端扫描到数据点时,其自由端的振幅和所受到的外力将发生变化,进而引起PZT压电层的介电常数发生变化.因此,通过检测悬臂梁上压电层的等效电容变化,便可以得到悬臂梁的振幅改变量,从而实现了对存储介质上数据的读取.实验结果表明,该可以实现1nm的位移检测分辨率.
By measuring the equivalent capacitance of the piezoelectric cantilever to detect the vibration information of the cantilever beams, the scanning probe technology can be used to read the data in the high-density information storage.On the piezoelectric cantilever PZT piezoelectric layer, The electric field causes it to work in a resonant state and makes its free end in periodic contact with the storage medium.When the free end of the cantilever is scanned to a data point, the amplitude of the free end and the external force will change, causing PZT The dielectric constant of the piezoelectric layer changes.Thus, by detecting the equivalent capacitance change of the piezoelectric layer on the cantilever, the amplitude of the cantilever beam can be changed, so as to read the data on the storage medium.Experimental results This shows that it is possible to achieve a displacement detection resolution of 1 nm.