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在硬质合金刀具上用CVD(化学汽相沉积)法涂敷一层薄的TiN涂层,可提高其切削性能。但CVD工艺所需的温度较高,会使钢产生相变,所以它不适用于高速钢刀具。目前已研究成功一种可在较低温度下涂敷TiN涂层的PVD(物理汽相沉积)工艺。在PVD工艺中,世界各国最常用的是ARE(激活反应蒸涂Activated Reactive Evaporation)法。我国目前也开始采用此法。 1.几种ARE工艺 (1)基本的ARE工艺 1971年ARE工艺首先被人们所采用,它是一种高速沉积工艺,适用于沉积碳化物、氮化物、氧化物、硫化物等高熔点化合物。在反应蒸涂中,金属蒸汽与气体原子产生反应,形成另一种金属或合金蒸汽,例如,2Ti+C_2H_2→2TiC+H_2。如果将金属原子和气体原子在汽相中进行激活和离子化,可产生完全反应。在该工艺中,利用加速电压电子束将金属加热,并使其熔解。在金属熔解层的顶部有一层薄的等离子表层。
Applying a thin TiN coating on a carbide tool by CVD (Chemical Vapor Deposition) increases its cutting performance. However, the higher temperatures required for CVD processes cause phase transformation in the steel, so it is not suitable for high speed steel tools. A PVD (Physical Vapor Deposition) process that can coat a TiN coating at a lower temperature has been investigated. In the PVD process, ARE (Activated Reactive Evaporation) method is the most commonly used in all countries in the world. My country is also now beginning to adopt this method. 1. Several ARE Processes (1) Basic ARE Processes The ARE process was first adopted in 1971. It is a high-speed deposition process for the deposition of high-melting compounds such as carbides, nitrides, oxides and sulfides. In reactive evaporation, the metal vapor reacts with the gas atoms to form another metal or alloy vapor, for example, 2Ti + C 2 H 2 → 2 TiC + H 2. If the metal atoms and gas atoms in the vapor phase activation and ionization, can produce complete reaction. In this process, the accelerating voltage electron beam is used to heat the metal and melt it. At the top of the metal melt layer there is a thin plasma surface.