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用脉冲激光沉积法制备类金刚石膜的实验中,保持其它实验参数不变,沉积时间分别取15、20min和25min来沉积类金刚石膜。用Raman光谱仪对薄膜的微观结构进行检测;用原子力显微镜对薄膜的表面形貌进行检测。检测结果表明,在其它实验参数不变的条件下,沉积时间从15min增加到20min时,薄膜中石墨晶粒数量或体积减小,sp3/sp2比值和薄膜密度明显增大,薄膜表面粗糙度显著降低。沉积时间从20min增加到25min时,薄膜中石墨晶粒数量或体积减小,但是sp3/sp2比值和薄膜密度都没有明显改变。
In the experiment of preparing diamond-like carbon film by pulsed laser deposition method, other experimental parameters were kept unchanged, and deposition time was 15, 20min and 25min respectively to deposit DLC film. The Raman spectrometer was used to measure the microstructure of the film. The surface morphology of the film was measured by atomic force microscopy. The results show that when the deposition time is increased from 15min to 20min, the number or volume of graphite grains decreases, the sp3 / sp2 ratio and the film density increase obviously, and the surface roughness of the film is significant reduce. When the deposition time increased from 20min to 25min, the number or volume of graphite grains in the film decreased, but the sp3 / sp2 ratio and the film density did not change significantly.