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RAINBOW压电驱动器是一种具有超大位移量和一定负载能力的新型压电驱动器。研究了基于铌锌锆钛酸铅压电陶瓷的RAINBOW器件 ,对其制备工艺进行了研究和探索 ,确定了合理的工艺参数和制备方法 ,成功地制备了拱形结构的RAINBOW器件 ;研究了该器件的压电、位移、谐振以及铁电性能,根据实验结果认为制备得到的RAINBOW器件 ,具有良好的位移性能 ,未极化的RAINBOW器件对于正负电场的响应 (极化、位移 )存在不对称现象。
The RAINBOW piezo actuator is a new type of piezo actuator with large displacement and load capability. The RAINBOW device based on zinc niobate zirconate-lead titanate piezoelectric ceramics was studied and its preparation process was studied and explored. The reasonable process parameters and preparation methods were determined and the RAINBOW device with arched structure was successfully prepared. The piezoelectricity, displacement, resonance and ferroelectric performance of the device are analyzed. According to the experimental results, the prepared RAINBOW device is considered to have good displacement performance. The unpolarized RAINBOW device has asymmetry in response (polarization and displacement) to the positive and negative electric fields phenomenon.