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本文研究具有强吸收结构的高速超导纳米线单光子探测器(SNSPD)的设计与仿真.该SNSPD基于高折射率入射介质和空气腔结构,可以提高超导纳米线的光子吸收率.与现有超导单光子探测器结构相比,在相同材料和厚度的超导超薄膜制成纳米线的条件下,用更低的占空比就可以实现接近于100%的吸收率,这使得电子束曝光步骤的难度大大降低.而SOI衬底的采用则可以同时保证超导薄膜的高质量生长,不影响探测器的本征量子效率.另外,在保证同样大的有效探测面积的条件下,由于需要的纳米线的总长度显著减小,制备过程中发生缺陷的概率显著降低,探测器的最高计数率可以得到提升.
In this paper, the design and simulation of a high-speed superconducting nanowire single photon detector (SNSPD) with strong absorption structure are studied. The SNSPD can improve the photon absorption rate of superconducting nanowires based on the high refractive index incident medium and air cavity structure Compared with the superconducting single-photon detector structure, the same material and thickness of the superconducting ultra-thin film made of nanowires under the conditions of lower duty cycle can be achieved near 100% absorption rate, which makes the electronic Beam exposure step is greatly reduced the difficulty of the use of SOI substrate while the superconducting film can also ensure the high-quality growth, does not affect the detector’s intrinsic quantum efficiency.In addition, to ensure the same large effective detection area conditions, Due to the significantly reduced overall length of the required nanowires, the probability of occurrence of defects during preparation is significantly reduced, and the maximum count rate of the detector can be increased.