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一、引言在研究半导体的过程中,Hauston 大学在 NASA(美国航空和航天局)的支持下制成了一种无需接触待测零件的电阻率测量装置。它的优点是能在小尺寸试样上对数值范围很宽的电阻率进行绝对测量,这样克服了通过表面电极直接测量的缺点。有接触的直接测量通常是借助于四端电极进行的,在待测试样相当小时或在电阻率很高的情况下可能会出现困难,也即是它的电阻率会显著升高。另一
I. INTRODUCTION In the study of semiconductors, Hauston University, with the support of NASA (NASA), made a resistivity measurement device that does not require access to the part under test. Its advantage is the absolute measurement of a wide range of resistivities over a small sample size, which overcomes the disadvantages of direct measurement through surface electrodes. Direct measurements with contact are usually made with the help of a four-terminal electrode, which can be difficult when the sample to be tested is quite small or when the resistivity is high, ie its resistivity is significantly increased. another