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本文描述直流辉光放电、10兆周高频加直流辉光放电原理和实验方法。给出了几种工作气体(H_2,He,Ar,N_2和空气)在30升圆筒形真空室中进行直流辉光放电、直流加高频辉光放电时起辉和灭辉气压随外加电压变化实验结果。实验表明,对于几百伏外加电压下H_2,He,Ar气可在10~(-1)帕气压下起辉;可以维持到10~(-2)帕气压才灭辉。几百伏直流电压附加10兆周高频电源可使起辉气压和灭辉气压下降几倍。空气和氮气比氢更易起辉。对HT-6M托卡马克真空室进行了几十小时常温和100℃中温烘烤条件下辉光放电清洗效果比较,表明边烘烤边辉光放电对水的清洗作用更好。实验由四极质谱仪监测,并用真空传输装置将样品传送到俄歇谱仪中分析放电前后表面成分的变化。对放电有关问题进行了讨论。
This article describes the DC glow discharge, 10 trillion cycles plus DC glow discharge principle and experimental methods. Several working gases (H 2, He, Ar, N 2 and air) are given for DC glow discharge in a 30 L cylindrical vacuum chamber. The experimental results show that under the DC plus high frequency glow discharge, result. Experiments show that for a few hundred volts applied voltage H_2, He, Ar gas can be 10 ~ (-1) Pa pressure under the pressure; can maintain to 10 ~ (-2) Pa pressure before dew. A few hundred volts DC voltage plus 10 trillion weeks of high-frequency power supply Hui Hui pressure and Hui Hui pressure drop several times. Air and nitrogen are easier to start than hydrogen. The comparison of the glow discharge cleaning effect of the HT-6M tokamak vacuum chamber for several dozen hours at room temperature and 100 ℃ under the medium temperature baking condition shows that the glow discharge on the side of the toasting effect the water better. The experiment was monitored by a quadrupole mass spectrometer and the sample was transferred to a Auger spectrometer using a vacuum transfer device to analyze changes in the surface composition before and after discharge. Discharge related issues were discussed.