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一种新型的硅微机械F P腔可变衰减器 ,具有体积小、插入损耗低、调节精度高等优点 ,介绍了其基本结构、基本原理。分析了F P腔两个反射镜的光学特性对F P腔性能的影响 ,包括两反射镜反射率对插入损耗、最大衰减量、工作范围的影响 ,以及F P腔腔长与衰减量之间的关系 ,分析了这种衰减器的带宽响应。衰减器体积只有 2 0 0× 2 0 0× 30 0 μm左右 ,插入损耗小于 2dB ,最大衰减量为 44dB左右。
A novel silicon micro-mechanical F P cavity variable attenuator has the advantages of small volume, low insertion loss and high regulation precision, and introduces its basic structure and basic principle. The influence of the optical properties of two mirrors in the FP cavity on the performance of the FP cavity is analyzed, including the influence of the reflectivity of the two mirrors on the insertion loss, the maximum attenuation and the working range, and the relationship between the cavity length and the attenuation of the FP cavity. The bandwidth response of this attenuator is analyzed. Attenuator volume is only 200 × 200 × 30 0 μm, the insertion loss is less than 2dB, the maximum attenuation is about 44dB.