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采用电子束加热蒸发金属Ｌｉ对ＷＯ３电致变色薄膜进行干法锂化，利用Ｘ光电子能谱和电化学方法分析不同锂化程度ＷＯ３薄膜的化学组分和电致变色性能。实验表明，当锂化ＷＯ３薄膜中Ｌｉ原子与Ｗ原子的数目比在０．１５左右时有良好的可逆性和着色效率。利用该方法制备了性能良好的单片式导Ｌｉ＋全固态电致变色薄膜器件Ｇｌａｓｓ／ＩＴＯ／ＷＯ３·Ｌｉ／ＬｉＦ·ＡｌＦ３／Ｖ２Ｏ５／Ａｌ。
WO3 electrochromic thin films were dry-lithiated by electron beam heating evaporation of Li, and the chemical compositions and electrochromic properties of WO3 films with different lithiation were analyzed by X-ray photoelectron spectroscopy and electrochemical methods. Experiments show that, when the number of Li atoms and W atoms in the lithiated WO3 film is about 0.15, good reversibility and coloring efficiency are achieved. The glass / ITO / WO3 · Li / LiF · AlF3 / V2O5 / Al monolithic Li + all solid state electrochromic thin film device with good performance was prepared by this method.