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多晶ＺｎＳｅ采用先进的ＣＶＤ技术生长，有着优异的光学特性，是激光与红外窗口材料的最佳选择之一。然而ＣＶＤ技术生长多晶ＺｎＳｅ，其工艺条件复杂，不同的生长条件有可能获得结构完全不同的多晶体，从而影响其光学性能。我们对不同的工艺条件下（主要包括生长温度、反应压力、气体流量、以及配比等），生长的ＺｎＳｅ晶体的结构进行了研究。多晶ＺｎＳｅ的微观结构不同，表现在两个不同的表面，即多晶体的生长表面和多晶的侧面结构。研究多晶体的生长表面结构，得到的结果表明晶粒的平均大小在其它工艺条件相对不变的情况下取决于生长沉积温度，即生长温度越高，晶粒的尺寸越大。此外，连续成核与生长、气体的均匀混合，是生长出晶粒大小的均匀，组分与结构均一的多晶体的关键因素之一，研究多晶体的侧面结构，发现生长条件不同，亦有极大的差别。有时初始生长过程与后期生长，由于配比和反应浓度的不稳定，还会导致分层结构。在高温条件下则容易呈现柱状生长结构，晶粒尺寸越来越大。研究结果表明最佳的侧面结构，应是一种无明显生长取向的多晶结构。这种无明显择优生长，均匀成核的多晶体有利于生长过程中，实现长时间的稳定生长，是获得厚尺寸，性能优异的多晶ＺｎＳｅ材料的关键之一。晶体的?
Polycrystalline ZnSe is grown using advanced CVD technology and has excellent optical properties, making it one of the best choices for laser and IR window materials. However, the growth of polycrystalline ZnSe by CVD technology is complicated, and the process conditions are complex. Different growth conditions may obtain polycrystals with completely different structures, thereby affecting their optical properties. We studied the structure of ZnSe crystals grown under different process conditions (including growth temperature, reaction pressure, gas flow rate, and ratio). The microstructure of polycrystalline ZnSe is different, manifested in two different surfaces, namely polycrystalline growth surface and polycrystalline side structure. The growth surface structure of polycrystalline is studied. The results obtained show that the average size of the grains depends on the growth and deposition temperature under the condition of other process conditions being relatively constant. That is, the higher the growth temperature, the larger the size of the grains. In addition, continuous nucleation and growth, uniform gas mixing is one of the key factors for the growth of uniform, uniform composition and structure of polycrystals. The polycrystalline side structure is studied and the growth conditions are different. Great difference. Sometimes the initial growth process and later growth, due to the instability of the ratio and reaction concentration, but also lead to the layered structure. Under high temperature, columnar growth structure is easy to appear, the grain size is getting bigger and bigger. The results show that the best side structure should be a polycrystalline structure without obvious growth orientation. The polycrystal without obvious preferential growth and uniform nucleation is conducive to the growth during the long-term growth and is one of the keys to obtain a polycrystalline ZnSe material with a thick size and excellent performance. Crystal?