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对方轨形AISI304不锈钢靶进行了氮的等离子体浸没离子注人(PⅢ)处理,试验结果表明,表面硬度明显提高,摩擦学特性也得到显著改善。其中上表面的改性效果明显优于侧表面。利用二维流体模型对注入过程中等离子体行为进行了模拟研究,结果表明:最大的注人剂量发生在上表面的中心区,在侧表面附近由于离子受到底面的竞争吸引,而使注入的剂量明显低于上表面,因而得到不同的改性效果。
The other rail-shaped AISI 304 stainless steel target was subjected to nitrogen plasma immersion ion implantation (PIII). The experimental results show that the surface hardness is significantly improved and the tribological properties are remarkably improved. Among them, the modification effect of the upper surface is obviously better than that of the side surface. A two-dimensional fluid model was used to simulate the plasma behavior during implantation. The results showed that the maximum injected dose occurred in the central region of the upper surface. Due to the competing attraction of the ions near the side surface, the injected dose Obviously lower than the upper surface, and thus get a different modification effect.