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正磷酸,通常称磷酸,在半导体工艺中,一般作为铝和银的腐蚀剂,用于半导体硅的腐蚀上,尚未见报导.本文着重介绍磷酸在硅功率二极管及高频高压硅堆台面形成上的应用.通过多年的实践经验证明,在台面腐蚀工艺中,它是一个新的优良的缓冲剂,加入磷酸能使台面光滑整洁,器件性能和成品率提高,因而增加了经济效益.
Orthophosphoric acid, commonly known as phosphoric acid, has not been reported in the semiconductor technology as an etchant for aluminum and silver for the etching of semiconductor silicon.This article focuses on the formation of phosphoric acid on silicon power diodes and high frequency high voltage silicon Application.It has been proven by many years of practical experience that it is a new and excellent buffering agent in the countertop etching process. The addition of phosphoric acid can make the countertops smooth and neat, and the device performance and yield increase, thus increasing the economic benefits.