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在同一泵体、同一测试条件下,对以Ti_(15)Mo合金、纯钛或47121合金作阴极的相同结构抽气单元,进行了抽气性能的对比测试。其结果是Ti_(15)Mo合金阴极对氢气抽速比纯钛提高60％以上,对空气抽速提高约15％,对氦气抽速达到抽空气的22％。并对Ti_(15)Mo泵芯在1.2×10~(-5)托氢压强下进行455小时抽氢试验,而抽速几乎没有衰减。对试验后的纯钛和Ti_(15)Mo阴极进行了金相、x光和氢浓度分析:Ti_(15)Mo阴极放电区表面并不生成TiH_2而是氢向体内扩散。我们的试验研究表明,Ti_(15)Mo合金是一种优良的溅射离子泵阴极材料,并设计制造了2TLH-150抽氢溅射离子泵。
In the same pump, the same test conditions, the same structure with Ti_ (15) Mo alloy, pure titanium or 47121 alloy as the exhaust unit, the exhaust performance comparison test. The result is that the cathode of Ti_ (15) Mo alloy can increase hydrogen pumping speed by over 60% compared with that of pure titanium, increase air pumping speed by 15% and pumping helium pumping speed by 22%. The hydrogen pumping test was carried out for 455h at Ti (15) Mo pump core under the pressure of 1.2 × 10 ~ (-5) Torr, and the pumping speed was almost no attenuation. The microstructure, x-ray and hydrogen concentration of pure titanium and Ti_ (15) Mo cathode after the test were analyzed: the surface of Ti_ (15) Mo cathode did not generate TiH_2 but hydrogen diffused into the body. Our experimental study shows that Ti_ (15) Mo alloy is an excellent cathode material for sputter ion pump and a 2TLH-150 pumping hydrogen ion sputtering pump is designed and manufactured.