论文部分内容阅读
本文依据LSS理论并考虑到反冲注入的特点,对反冲注入中入射离子的能量和镀层厚度提出如下选择原则: 1.入射离子的能量应对应于(dε/dρ)。～ε~1/~2普适曲线的极大值。2.镀层厚度应与入射离子在镀层中的投影射程大体一致。实验结巢(如表面硬度的测试,磨损试验,俄歇深度剖析)证明,上述选择原则是合理的。
Based on the LSS theory and taking into account the characteristics of recoil injection, we propose the following principles for the energy and thickness of incident ions in recoil implants: 1. The energy of the incident ions should correspond to (dε / dρ). ~ Ε ~ 1 / ~ 2 The maxima of universal curve. 2. The thickness of the coating should be approximately the same as the projection of incident ions in the coating. Experimental knot nest (such as the surface hardness test, wear test, Auger depth analysis) proved that the above selection principle is reasonable.