Design of Microstructure Parameters on a Small Multi-Throttle Aerostatic Guideway in Photolithograph

• 作 者: Zhongpu Wen Jianwei Wu Kunpeng
• 机 构: CenterofUltra-PrecisionOptoelectronicInstrumentationEngineering,KeyLabofUltra-PrecisionIntelligentIn
• 出 处: 工程(英文)
• 发表日期: 2021年2期
• 关键词: PHOTOLITHOGRAPHY Multi-throttle aerostatic guideway MICROSTRUCTURE Working point
• 基金项目: This work was funded by the National Natural Science Foundation of China(51675136),the National Science and Technology Major Project(2017ZX02101006-005),the Heilongjiang Natural Science Foundation(E20

A compact multi-throttle aerostatic guideway is the preferred structure for high precision and acceleration motion in the variable-slit system(VS)of photolithography.The presence of microstructure,such as recesses and grooves,on the guideway working surfa