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当今,甚低能离子束(几十ey—几个keV)在材料科学中发挥着越来越大的作用。低能离子注入和低能离子束沉积(尤其是经过质量分析的)在离子溅射等应用基础研究和各种功能膜的制备等方面有着宽广的应用前景。应用实验室电磁同位素分离器制备核物理实验用各种稳定同位素靶(几十—几百μg/cm~2的薄靶)时为了提高收集效率(要使自溅射系数小于1),也需
Today, very low energy ion beams (tens of ey-a few keV) play an increasingly important role in material science. Low-energy ion implantation and low-energy ion beam deposition (especially after mass spectrometry) have broad application prospects in the basic research of ion sputtering applications and the preparation of various functional films. Applications Laboratory Electromagnetic Isotope Separators To prepare various stable isotope targets for nuclear physics experiments (tens to hundreds of μg / cm 2 thin targets) to improve collection efficiency (to make self-sputtering less than 1)