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YT—8B型晶体管自动控温管式炉是半导体器件制造中的常用设备。由于长期使用,加之各种原因的腐蚀,元器件参数和性能发生很大变化,使得该设备的温度重复性差,控温精度无法保证。例如,44所三室的一台YT—8B型炉就属于这类情况,于79年报废。但该设备具有体积小、重量轻、升温快、使用方便等优点,因此有必要通过技术改造,
YT-8B transistor automatic temperature control tube furnace is commonly used in the manufacture of semiconductor devices. Due to long-term use, combined with various causes of corrosion, component parameters and performance changes greatly, making the device’s poor temperature repeatability, temperature control accuracy can not be guaranteed. For example, one of the 44 three-room YT-8B furnaces fell into this category and were scrapped in 1979. However, the device has the advantages of small size, light weight, rapid heating, ease of use and the like. Therefore, it is necessary to adopt technological innovation,