论文部分内容阅读
介绍了基于C-W复合膜/无定形碳纳米岛的表面传导电子发射阴极,并对其制备工艺和发射性能进行讨论。利用低熔点纳米Bi岛作为掩模刻蚀得到无定形碳的纳米岛结构,在保留大岛形貌的同时,去除了一定量的小岛结构;同时在无定形碳中掺入少量的W原子,制作导电性极佳的C-W复合膜作为上层发射层,利于激活形成电子发射区域。通过对工艺参数的优化,得到了稳定、均匀的电子发射,电子发射率在阴阳极间距2mm、阳极电压为3 kV时达到0.9%,向器件实用化方向迈出了重要的一步。
The surface conduction electron-emitting cathode based on C-W composite film / amorphous carbon nano-island is introduced, and the preparation process and emission performance are discussed. The use of low melting point nano-Bi island as a mask etching amorphous nano-island structure of the island, while preserving the island morphology, while removing a certain amount of island structure; at the same time in the amorphous carbon with a small amount of W atoms , Making excellent conductive CW composite film as the upper emission layer, which is conducive to the activation of the formation of electron emission region. Through the optimization of the process parameters, a stable and uniform electron emission was obtained. The electron emission rate reached 0.9% at the anode-cathode distance of 2mm and the anode voltage of 3kV, making an important step in the practical application of the device.