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精密光栅的刻划,需要严格的工艺及复杂的检验。采用莫尔效应的检验工作则可精确而又简便。其方法是将一块标准光栅和一块待测光栅迭置,在透射或反射光照下,形成莫尔条纹。根据条纹形状,作出相应的判断,比如从不规则条纹出现的位置找到光栅缺陷的地方等。本文着重介绍如何用微机自动处理条纹信号,提供评价光栅质量的全面要素。
Precision grating engraving, the need for strict process and complex inspection. Inspection using the Moire effect can be accurate and easy. The method is a standard grating and a grating to be measured Diego, in the transmission or reflection of light, the formation of Moire fringes. According to the shape of the stripes, make the appropriate judgments, such as irregular stripes found where the grating defects and so on. This article focuses on how to automatically process the stripe signal with a microcomputer to provide a comprehensive evaluation of the quality of the grating elements.