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比对法真空计量标准装置是一种结构简单、操作方便、检定效率高、实用性强的二等真空标准装置。主要技术要求完全符合国际标准化组织(ISO)和国内有关真空标准的规定,尤其适用于真空计量二级站和一些基层单位大量常规校准,校准范围为10~5～10~(-4)Pa,总不确定度小于10％。在10~(-4)Pa范围内,压力的稳定度好于1％,在1～10~5Pa范围内,压力的稳定度好于0.5％。该标准装置的极限压力达10~(-6)pa。
Alignment method vacuum gauge standard device is a simple structure, easy operation, high verification efficiency, practicality of second-class vacuum standard device. The main technical requirements in full compliance with the International Organization for Standardization (ISO) and the relevant provisions of the relevant vacuum standards, in particular, is suitable for a large number of routine vacuum calibration station and some grass-roots units, the calibration range of 10 ~ 5 ~ 10 ~ (-4) Pa, The total uncertainty is less than 10%. The pressure stability is better than 1% in the range of 10 ~ (-4) Pa, and the pressure stability is better than 0.5% in the range of 1 ~ 10 ~ 5Pa. The standard device of the ultimate pressure of 10 ~ (-6) pa.