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介绍了一套为亚微米级超精密金刚石车床在线测量而研制的双坐标双频激光干涉位置测量系统 .在此测量系统中以双频激光干涉测量仪作为测长仪器 .本测量系统中还包含了数据采集系统、快速数据通讯系统和空气参数误差补偿系统 ;为提高该激光测量系统的精度还采用了激光的稳频措施 .由于该测量系统具有很高的测量精度和较高的测量频响 ,它完全能满足所研制的亚微米级超精密金刚石车床在线位置测量的要求 .
A set of dual-coordinate dual-frequency laser interferometer position measuring system developed for on-line measurement of sub-micron ultra-precision diamond lathe is introduced in this measuring system which uses dual-frequency laser interferometer as length measuring instrument. The measuring system also includes A data acquisition system, a fast data communication system and an air parameter error compensation system, a laser frequency stabilization measure is also used to improve the accuracy of the laser measurement system.Because the measurement system has high measurement accuracy and high measurement frequency response , It can fully meet the requirements of the on-line measurement of submicron ultra-precision diamond lathe developed.