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在分析微机械热对流加速度传感器的工作原理及其有限元仿真的基础上,对传感器的瞬态响应进行了分析,建立了描述热对流加速度传感器频率响应特性的半定量的理论模型。结合有限元仿真结果,模型预测的热对流加速度传感器的频响与实际的传感器的频响较好地吻合。设计了传感器频率补偿电路,讨论了电路参数优化的途径,通过电路仿真方法得到优化的电路参数,仿真得到的补偿之后-3 dB带宽为112.5 Hz,构筑了传感器频率补偿电路并对补偿效果进行测试。结果表明:补偿之前-3 dB带宽为22.6 Hz,补偿之后实测-3 dB带宽拓展为106.0 Hz,与仿真结果基本吻合,成功将传感器频响扩展到100 Hz以上,满足应用的需要。
Based on the analysis of the working principle and finite element simulation of the thermocouple acceleration sensor, the transient response of the sensor is analyzed and a semi-quantitative theoretical model describing the frequency response characteristics of the thermal convection acceleration sensor is established. Combined with the results of finite element simulation, the frequency response of the thermal convection acceleration sensor predicted by the model is in good agreement with the actual frequency response of the sensor. The frequency compensation circuit of the sensor is designed, and the way to optimize the circuit parameters is discussed. The optimized circuit parameters are obtained through the circuit simulation method. After the simulation, the -3 dB bandwidth is 112.5 Hz, the sensor frequency compensation circuit is constructed and the compensation effect is tested . The results show that the bandwidth of -3 dB before compensation is 22.6 Hz, and the measured -3 dB bandwidth expands to 106.0 Hz after compensation, which is in good agreement with the simulation results. The frequency response of the sensor is extended to over 100 Hz, which meets the needs of applications.