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现己发明一种用来对１０－３～２０乇范围的压强进行连续测量的振动膜型真空计。测量压强的方法有两种。一种方法的依据是振动膜的振幅依赖于气体压强。用这种方法得到了下列特性：（１）在０．２乇时的应答时间为０．０６秒３（２）灵敏度对温度的依赖性在０．２毛时为０．０８％／℃、。在１０乇时为－ ０．２％／℃（３）在室温时的可重复性小于 ０．７％。另一种方法的依据是膜的共振频率依赖于气体压强。由此法得到的显著特性是灵敏度对气体种类的依赖性很小。例如，对空气和氦气的灵敏度的差在１０乇时为４％。
A diaphragm type vacuum gauge has now been invented for continuously measuring the pressure in the range of 10-3 to 20 torr. There are two ways to measure pressure. One approach is based on the fact that the amplitude of the diaphragm depends on the gas pressure. The following characteristics were obtained by this method: (1) The response time at 0.2 torr was 0.06 sec 3 (2) The dependence of sensitivity on temperature was 0.08% / ° C at 0.2 hairs, . -0.2% / ° C at 10 Torr (3) Repeatability at room temperature is less than 0.7%. Another approach is based on the fact that the resonant frequency of the membrane depends on the gas pressure. The salient characteristic obtained by this method is that sensitivity has little dependency on gas species. For example, the difference in sensitivity to air and helium is 4% at 10 torr.