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在各种工具上涂覆耐磨和耐蚀薄膜的实践中，用离子－等离子溅射复合阴极（靶）工艺制取的多组分和多相涂层正得到愈来愈多应用。自蔓延高温合成（ＣＢＣ）法可获得形形色色的陶瓷基、金属陶瓷基和金属间化合物基阴极谱。陶瓷阴极的一个本质缺陷是其导热性低，从而导致阴极材料
Multi-component and multi-phase coatings made with ion-plasma sputter composite cathode (target) processes are gaining more and more applications in the practice of applying wear and corrosion resistant films to various tools. Self-propagating high temperature synthesis (CBC) method to obtain a variety of ceramic-based, cermet-based and intermetallic compound-based cathodic spectroscopy. An essential drawback of ceramic cathodes is their low thermal conductivity, which leads to cathode materials