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依据新型航天红外组件寿命试验设备的真空系统的技术要求,设计了具有两套抽气系统的全自动化高真空排气台,主真空系统以机械泵和分子泵作为前级泵,溅射离子泵作为主抽泵;辅助真空系统由机械泵和分子泵组成,用于主系统预抽。该真空系统采用计算机控制技术程控真空排气工艺,为多工位结构,具有全自动化的功能。根据理论计算分析,该设备能满足红外组件寿命试验对真空的要求。
According to the technical requirements of the vacuum system of the life test equipment of the new aerospace infrared module, a fully automatic high vacuum evacuation unit with two air extraction systems is designed. The main vacuum system uses a mechanical pump and a molecular pump as a foreline pump, a sputter ion pump As the main pump; auxiliary vacuum system consists of mechanical pumps and molecular pumps for the main system pre-pumping. The vacuum system uses computer-controlled technology to control the vacuum exhaust process, which is a multi-station structure with fully automatic functions. According to theoretical calculation and analysis, the device can meet the vacuum requirements of the infrared component life test.