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根据晶态和非晶态氮化硅原子的相关性结构特征,构造出了正四面体N结构和平面三角形Si结构相互嵌套的基本结构单元,模拟出了纳米量级非晶氮化硅的结构模型,其主要结构参数与实验吻合,这种模型可进一步用于非晶和纳米非晶氮化硅材料的结构和性能研究之中.
According to the related structural features of crystalline and amorphous silicon nitride atoms, the basic structural units with the regular tetrahedral N structure and the planar triangular Si structure nested with each other were constructed, and the nano-scale amorphous silicon nitride The main structural parameters are in good agreement with the experimental ones. The model can be further used to study the structure and properties of amorphous and nano-amorphous silicon nitride materials.