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采用溶胶-凝胶工艺,用提拉法在普通玻璃上制备TiO2-SiO2/SiO2复合增透膜。用紫外-可见光谱(UV-Vis)测试膜层的透射率,计算复合膜层的光学常数、折射率和膜层的厚度;用扫描电镜(SEM)观察膜层的表面形貌;研究TiO2-SiO2的比例以及热处理工艺对复合膜光学常数的影响。结果表明:溶胶的稳定性是整个工艺的关键与基础,溶胶中乙醇含量、陈化时间以及热处理制度会对膜层的折射率和厚度造成影响,从而导致整个复合膜的透过率变化。通过优化工艺,制备出在可见光范围最大透过率>98%、平均透过率约为95%的高增透膜,并对得到的结果进行详细地讨论。
Sol-gel process was used to prepare TiO2-SiO2 / SiO2 AR coating on ordinary glass by Czochralski method. The optical constants, refractive index and film thickness of the composite film were calculated by UV-Vis spectroscopy. The surface morphology of the film was observed by scanning electron microscopy (SEM) SiO2 ratio and heat treatment process on the optical constants of the composite film. The results show that the stability of the sol is the key and foundation of the whole process. The content of ethanol, aging time and heat treatment in the sol affect the refractive index and the thickness of the film, resulting in the change of the transmittance of the whole composite film. By optimizing the process, a high AR coating with a maximum transmittance in the visible range of> 98% and an average transmittance of about 95% was prepared and the results obtained were discussed in detail.