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本文研究了在适当气氛下,BCl_3浓度、气体流速,温度和时间等工艺参数对在BCl_3+H_2介质中的气体渗硼的影响规律。使用渗硼试样的实际增重与单纯由硼原子渗入而引起的理论增重之比(△m/m_(b a))定量地衡量渗硼层的质量。探讨了工艺参数选用的合理性,提出用单位炉膛截面上,BCl_3的流量(v·c)衡量BCl_s的用量多少,BCl_3浓度降至0.8vol·％,气体流速为0.49cm/s渗硼仍可获得良好渗层。在可比条件下,BCl_3的用量较目前国内外文献报导的最低用量降低了十几倍。成功地用气体法直接获得了单相Fe_2B渗层。
In this paper, the effects of BCl_3 concentration, gas flow rate, temperature and time on gas boronizing in BCl_3 + H_2 media under proper atmosphere were studied. The quality of the boronizing layer is quantitatively evaluated by the ratio of the actual weight gain of the boronizing sample to the theoretical weight gain (Δm / m_ (b a)) caused by the infiltration of boron atoms. The rationality of process parameter selection was discussed. It was proposed to measure the amount of BCl_s using the flow rate of BCl_3 (v · c) on the cross section of unit hearth. The concentration of BCl_3 was reduced to 0.8vol% and the gas flow rate was 0.49cm / s. Get a good layer. Under comparable conditions, the dosage of BCl_3 is more than tenfold lower than the lowest dosage reported in literature at home and abroad. The successful single-phase Fe 2 B permeation was obtained by gas method.