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采用化学气相沉积(CVD)法制备高纯钛。以经典的成核理论为依据,对钛在沉积基体上的成核过程进行热力学和动力学分析,计算出成核过程吉布斯自由能ΔGmax、成核速率v和临界晶核直径D0的数学方程;并且考察了影响钛沉积速率的因素,结果表明:卤化区的温度、分解区的温度、低价碘化物和高价碘化物的蒸汽压都对钛的沉积速率有一定的影响,其中两区的温度对钛的沉积速率影响较大。
High purity titanium is prepared by chemical vapor deposition (CVD). Based on the classical nucleation theory, the nucleation process of titanium on the deposition matrix was analyzed by thermodynamics and kinetics, and the mathematics of Gibbs free energy ΔGmax, nucleation rate v and critical nucleus diameter D0 during nucleation The results show that the temperature of the halogenation zone, the temperature of the decomposition zone, the vapor pressures of the low-valent iodides and the high-valent iodides all have some influence on the deposition rate of titanium, of which two zones The temperature of titanium deposition rate greater impact.